Work

Design, Fabrication, and Characterization of High-Stiffness Suspended Microcalorimeters With Nanowatt Power Resolution

Year: 2025

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2025.3543201

Authors: Cedric Shaskey, Amun Jarzembski, Milo Birdwell, Keunhan Park

Institutions: University of Utah, Sandia National Laboratories

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, University of Utah

Awards: G3561747511, Investigation of Extreme Near-Field Thermal Radiation at Sub-10-nm Vacuum Gap Distances

OpenAlex ID: W4411012237

FWCI:

Cites: 39

Cited by:

Related to: 10