Work

Efficient surrogate modeling for accelerated generalized ellipsometry in nanostructure metrology

Year: 2025

Type: article

Source: Surface Topography Metrology and Properties

DOI: 10.1088/2051-672x/ade26f

Authors: Yihang Xu, Kai Meng, Hangying Zhang, Peihuang Lou, Xiaoming Qian

Institutions: Ministry of Industry and Information Technology, Nanjing University of Aeronautics and Astronautics

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G47376943

OpenAlex ID: W4411137152

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