Work

Development of low-GWP gases for TSV process using digital twin

Year: 2025

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.35848/1347-4065/ade260

Authors: Suzuka Okamoto, Miki Ishibushi, Yohei Takakura, Yasuhiro Nojiri, Osamu Kumagai, Hisataka Hayashi

Institution: Daikin (Japan)

Language: English

Topic: 3D IC and TSV technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDGs: Industry, innovation and infrastructure, Responsible consumption and production, Climate action

Open Access status: closed

OpenAlex ID: W4411137212

FWCI: 0.462

Cites: 20

Cited by: 2

Related to: 10