Work

An improved detection algorithm using RFS-YOLOv8n for wafer surface defect

Year: 2025

Type: article

Source: Measurement Science and Technology

DOI: 10.1088/1361-6501/ade27d

Authors: Lin Xu, Jinsong Peng, Pengfei Liu, Lianchao Sheng, Xiangning Lu, Zhenzhi He

Institution: Jiangsu Normal University

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G6198428838, G988679790

OpenAlex ID: W4411137255

FWCI: 4.07

Cites: 29

Cited by: 8

Related to: 10