Design and Fabrication of a Dual-Range MEMS Capacitive Accelerometer With a Novel Dual-Flexural Suspension System
Year: 2025
Type: article
Source: IEEE Sensors Journal
Institution: Amirkabir University of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4411142888