Work

Nonlinearity Reduction in Three-End Serpentine Torsion Bar of MEMS Mirror

Year: 2025

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2025.3576255

Authors: Xudong Song, Dayong Qiao, Xiumin Song

Institution: Northwestern Polytechnical University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G1182707824, G3830354624, G5304394460

OpenAlex ID: W4411203193

FWCI:

Cites: 25

Cited by:

Related to: 10