Fabrication of β-Ga₂O₃ Schottky Photodetectors With ε-Ga₂O₃ Cap Layer via Temperature-Lowering Process Mist-CVD Heteroepitaxy
Year: 2025
Type: article
Authors: Hao-Chun Hung, Chia-Cheng Hsu, Ching-Yu Cheng, Yin-Chu Hsiao, Chien-Sheng Cheng, Rong-Ming Ko, Han-Yin Liu, Wei-Chou Hsu
Language: English
Topic: Ga2O3 and related materials
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Awards: G2124547312, G4370822837
OpenAlex ID: W4411203590
