Work

Surface nanoparticle monitoring for plasma etching chamber components using single particle inductively coupled plasma mass spectrometry (SP ICP-MS)

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0004481

Authors: Lisa Mey-Ami, Fuhe Li

Language: English

Topic: Analytical chemistry methods development

Subfield: Analytical Chemistry

Field: Chemistry

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4411211462

FWCI: 0.737

Cites: 16

Cited by: 2

Related to: 10