Demonstration of Conformal MoS2 on High-Aspect-Ratio Structures up to 40:1 and Exploration of Manufacturability in a 300mm Fab for 3D NAND applications
Year: 2025
Type: conference-paper
Authors: Hao-Ling Tang, Keith T Wong, Minrui Yu, Jason Appell, Pei Liu, Chunyu Wong, Yi-Hsuan Sharon Hsiao, Hongwen Zhou, Luc Thomas, Lixia Rong, Lavinia Nistor, Ming-Hui Chiu, Xin Meng, Jee-Jay Chen, Dongqing Yang, Gopal Bajaj, Arvind Kumar, Michel Frei, Srinivas D Nemani, Mahendra Pakala, Ellie Yieh
Institution: Applied Materials (United States)
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4411233116