Deposition of ALD-Molybdenum for Flash Memory Wordline Metallization
Year: 2025
Type: conference-paper
Authors: Joshua Collins, Sanjay Gopinath, Kaihan Ashtiani, Shruti Thombare, Xiaolan Ba, Griffin Kennedy, Juwen Gao
Institution: Lam Research (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4411233180