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On-Chip Capacitors with Wall-Type Structure in 9th Generation 3D VNAND Flash Memory

Year: 2025

Type: conference-paper

Source: IEEE International Memory Workshop (IMW)

DOI: 10.1109/imw61990.2025.11026946

Authors: Tae-Gon Lee, Ji-Eun Ha, Kang-In Lee, Jung-Hwan Lee, Hyung-Geun Yook, In-Chul Shin, Jang-Hwan Jeong, Min-Kyu Kang, Joon-Sung Lim, Kyungyoon Noh, Seungwan Hong, Sung-Hoi Hur

Institutions: Samsung (South Korea), Samsung Electronics (South Korea)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4411233337

FWCI:

Cites: 7

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Related to: 10