Work

Fabrication and integration of diffraction gratings on electrostatic stepper motor for imaging spectrometer applications

Year: 2025

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/1361-6439/ade448

Authors: Sanathanan S Muttikulangara, Maciej Baranski, Jianmin Miao

Institution: Nanyang Technological University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Research Foundation Singapore, Economic Development Board - Singapore

Award: G3735430837

OpenAlex ID: W4411260661

FWCI: 0.225

Cites: 41

Cited by: 1

Related to: 10