Work

Design and fabrication of a novel compact RF MEMS series capacitive switch with reduced warping

Year: 2025

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/1361-6439/ade447

Authors: Zhichao Ma, Qiuquan Guo, Jun Yang, Guangyao Yang, Kun Deng, Naibo Zhang

Institutions: University of Electronic Science and Technology of China, China Electronics Technology Group Corporation

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Shenzhen Science and Technology Innovation Program

OpenAlex ID: W4411260748

FWCI: 0.23

Cites: 19

Cited by: 1

Related to: 10