Work

Near-Spurious-Free 6.5 GHz XBARs With Dimension-Matched and Response-Averaged Electrodes

Year: 2025

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2025.3577619

Authors: Zihao Xie, Xianhao Le, Tengbo Cao, Feng Gao, Qing Wan, Jin Xie

Institutions: State Key Laboratory Fluid Power and Mechatronic Systems, Zhejiang University, Yongjiang Laboratory

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G8956656836, G99739193

OpenAlex ID: W4411270338

FWCI: 1.184

Cites: 32

Cited by: 5

Related to: 10