Work

Analysis of Factors Influencing the Selective Etching of {100} Surface of Single-Crystal Gaas Usedto Determine the Dislocation Density

Year: 2024

Type: article

Source: Inorganic Materials Applied Research

DOI: 10.1134/s2075113325700200

Authors: R. A. Verbitsky, K. S. Polzikova, Yu. V. Syrov, S. N. Knyazev

Institution: Giredmet (Russia)

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4411277290

FWCI:

Cites: 15

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Related to: 10