Work

Application of high-spatial-resolution distributed fiber-optic sensing technique for neutral gas temperature mapping in inductively coupled Ar plasmas

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0004640

Authors: Qian Luo, Tuo Lv, Peng-Yu Wang, Da-Peng Zhou, Fei Gao, You-Nian Wang

Institutions: Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion and Electron Beams

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: 面向工业等离子体源的一些关键科学问题的研究, G7118009150

OpenAlex ID: W4411279580

FWCI: 0.462

Cites: 41

Cited by: 2

Related to: 10