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Effective Deep Reinforcement Learning for Dynamic Machine Allocation: A Case Study on Metal Sputtering Tools

Year: 2025

Type: article

Source: IEEE Transactions on Semiconductor Manufacturing

DOI: 10.1109/tsm.2025.3579970

Authors: Hsin-Tzu Hsu, Shi-Chung Chang

Institution: National Taiwan University

Language: English

Topic: Scheduling and Optimization Algorithms

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funders: Taiwan Semiconductor Manufacturing Company, National Science and Technology Council

Awards: G4655955081, G5827997119, G7493637360

OpenAlex ID: W4411336783

FWCI: 0.509

Cites: 19

Cited by: 1

Related to: 10