Year: 2025
Type: article
Abstract: This work investigates and compares the response of piezoelectrically actuated nonlinear microelectromechanical devices (MEMS) to direct and to degenerate parametric drives. We describe the regime of degenerate parametric amplification in piezoelectric Duffing-type nonlinear MEMS devices using a single mode expansion, and we then explore the existence of regions in parameter space where parametric excitation may be advantageous compared to direct drive, which we label “parametric advantage.” Analytical, experimental, and numerical verification demonstrates that parametric advantage cannot exist if both pump and signal voltages are accounted for in the total voltage budget. This work determines non-dimensional scaling rules that can act as guidelines for selecting an optimal operating regime for degenerate parametric amplification.
Source: Applied Physics Letters
DOI: 10.1063/5.0276761
Authors: Samer Houri, Veronique Rochus
Institution: IMEC
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W4411347136