Work

Particle-free thin film deposition from acetylene and silane precursors using atmospheric plasma vacuum ultraviolet radiation

Year: 2025

Type: article

Source: Journal of Physics D Applied Physics

DOI: 10.1088/1361-6463/ade54b

Authors: T Winzer, C Reiser, J Benedikt

Institution: Christian-Albrechts-Universität zu Kiel

Language: English

Topic: Plasma Applications and Diagnostics

Subfield: Radiology, Nuclear Medicine and Imaging

Field: Medicine

Domain: Health Sciences

Open Access status: closed

Funder: Deutsche Forschungsgemeinschaft

Award: G6123160490

OpenAlex ID: W4411363195

FWCI: 0.545

Cites: 154

Cited by: 1

Related to: 10