Work

Design and Fabrication of a Small-Range Silicon Piezoresistive Differential Pressure Sensor

Year: 2025

Type: conference-paper

DOI: 10.1109/eeice65049.2025.11034226

Authors: Tianlong Liang, Zeyu Lian, Dejin Gao, Jiahao Yang, Yulong Chen, Wenwei Zhang

Institution: Shenzhen Technology University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4411408905

FWCI:

Cites: 10

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Related to: 10