Work

Period control of silicone grating via toluene addition

Year: 2025

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.35848/1347-4065/ade64d

Author: Itsunari Yamada

Institution: Setsunan University

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4411443178

FWCI: 0.241

Cites: 38

Cited by: 1

Related to: 10