Work

Piezoresistive Angle Feedback Sensors With Various Schemes in MEMS Micromirrors

Year: 2025

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2025.3575334

Authors: Er-Qi Tu, Xiao-Yong Fang, Fei Zhao, Jia-Hao Wu, Wen-Ming Zhang

Institutions: Shanghai Jiao Tong University, State Key Laboratory of Mechanical System and Vibration, Huawei Technologies (China)

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G2558717328, G3954363449

OpenAlex ID: W4411446299

FWCI: 0.462

Cites: 42

Cited by: 2

Related to: 10