Work

Self-Bonding Piezoelectric Micromirrors for Integrated Atomic Beam Devices

Year: 2025

Type: conference-paper

Source: IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

Authors: Jiacheng Wang, Ce Pei, Chandra S Raman, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

Award: NNCI: Southeastern Nanotechnology Infrastructure Corridor (SENIC)

OpenAlex ID: W4411484791

FWCI:

Cites: 10

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Related to: 10