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Optimized Structure Design for High Quality Factor Based on MEMS Quadruple Mass Gyroscope

Year: 2025

Type: conference-paper

Source: IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

Authors: Jianjun Ma, Bin Zhou, Qi Wei, Rong Zhang

Institution: Tsinghua University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4411484947

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Cites: 4

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Related to: 10