Revealing the role of Si vacancies and interfaces in SiHCl 3 dissociation applied in polysilicon
Year: 2025
Type: article
DOI: 10.1039/d5cp01189b
Authors: Mao Peng, Jia Ren, Wei Li, Chenliang Ye, Jinli Zhang
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4411566252
