Work

Research on Material Outgassing Measurement System with an In-Situ Calibration

Year: 2025

Type: article

Source: MAPAN

DOI: 10.1007/s12647-025-00828-8

Authors: Yan Luo, Wenyu Lin, Kuibo Wang, Xiaobin Wu, Xudi Wang

Institutions: Chinese Academy of Sciences, Institute of Microelectronics, Hefei University of Technology

Language: English

Topic: Scientific Measurement and Uncertainty Evaluation

Subfield: Instrumentation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: 基于在线计量技术的极紫外光致放气机理研究

OpenAlex ID: W4411576911

FWCI:

Cites: 24

Cited by:

Related to: 10