Work

A microelectromechanical system-based terahertz spiral metamaterial for pneumatic pressure sensing applications

Year: 2025
Type: article
Abstract: . Meanwhile, the behavior of the TSM device exposed to an ambient environment with different refraction indices indicates its potential for biochemical sensing, and the sensitivity is up to 1.290 THz per RIU. These results offer a practical and compact multifunctional sensor for biochemical and pressure detection and open an avenue for applications in the field of THz optoelectronics.
Language: English
Open Access status: gold
Estimated APC paid: $1,962
OpenAlex ID: W4411577090
FWCI: 0.319
Cites: 48
Cited by: 2
Related to: 10