A Novel Opto-Mechanical Accelerometer in Low-Loss Silicon Nitride Photonics Platform With High Dynamic Range Achieved via Heterodyne Detection
Year: 2025
Type: article
Source: IEEE Sensors Journal
Institution: The University of Texas at Austin
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4411599642