Work

AlScN Multilayer SAW Resonators Achieving K 2 eff > 4% in Sezawa Mode With Au Bonding Layer

Year: 2025

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2025.3581581

Authors: Jiazhe Zhang, Shaocheng Wu, Fei Lu, Zhenglin Yang, Yuhang Dou, Daquan Yu, Baoping Zhang, Rongbin Xu

Institution: Xiamen University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G4135110769, G8500132233

OpenAlex ID: W4411687356

FWCI: 0.241

Cites: 33

Cited by: 1

Related to: 10