Work

Two-dimensional simulation of capacitively coupled plasma breakdown under low-pressure conditions

Year: 2025

Type: article

Source: Plasma Sources Science and Technology

DOI: 10.1088/1361-6595/ade913

Authors: Zhaoyu Chen, Zili Chen, Hao Wu, Yu Wang, Yonghua Ding, Wei Jiang, Donghui Xia, Ya Zhang

Institutions: Huazhong University of Science and Technology, Hubei University of Science and Technology, Wuhan University of Technology

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Natural Science Foundation of Hubei Province, Hubei University of Science and Technology

Awards: G3413899859, G3658540377, G6680748996, G7633334031

OpenAlex ID: W4411720778

FWCI: 0.907

Cites: 58

Cited by: 4

Related to: 10