Work

Evaluation of Thick Silicon Nitride Film Properties at 300 mm Scale for High-Q Photonic Devices

Year: 2025

Type: article

Source: IEEE Transactions on Semiconductor Manufacturing

DOI: 10.1109/tsm.2025.3583925

Authors: Soumen Kar, Nicholas W. Gangi, Katrina A. Morgan, Lewis G. Carpenter, Nicholas M. Fahrenkopf, Yukta Timalsina, Christopher V. Baiocco, David Harame

Institution: AIM Photonics (United States)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Air Force Research Laboratory

Award: G8801098800

OpenAlex ID: W4411725343

FWCI:

Cites: 22

Cited by:

Related to: 10