Work

Capacitive Length-Extension Mode Resonators with Stress-Induced Gap-Closing Electrodes for Motional Resistance Reduction

Year: 2025

Type: conference-paper

Source: IEEE Electron Devices Technology & Manufacturing Conference (EDTM)

DOI: 10.1109/edtm61175.2025.11040724

Authors: Hao Yu, Yechen Miao, Fang Wang, Ke Sun, Yi Sun, Tiger H. Tao, Heng Yang

Institutions: Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4411799119

FWCI:

Cites: 4

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Related to: 10