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High Endurance Nanoscale TiN Bottom Heater for Phase Change Memory

Year: 2025

Type: conference-paper

Source: IEEE Electron Devices Technology & Manufacturing Conference (EDTM)

DOI: 10.1109/edtm61175.2025.11040911

Authors: Ziqi Wan, Wencheng Fang, Li Xie, Xi Li, Ruobing Wang, Zhitang Song, Xilin Zhou

Institutions: Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology

Language: English

Topic: Phase-change materials and chalcogenides

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

SDG: Affordable and clean energy

Open Access status: closed

OpenAlex ID: W4411799139

FWCI: 5.224

Cites: 13

Cited by: 1

Related to: 10