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High-Frequency Capacitance Measurement Techniques and Their Applications in Memory Technology Development

Year: 2025

Type: conference-paper

Source: IEEE Electron Devices Technology & Manufacturing Conference (EDTM)

DOI: 10.1109/edtm61175.2025.11041666

Authors: Jiang Qian, Dan Lv, Lu Wang, Ruiqi Ma, Shuai Kong, Shanting Zhang, Dongdong Li, Liang Zhao

Institutions: Zhejiang University, Shanghai Zhangjiang Laboratory, Zhangjiang Laboratory

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

Award: G1344263320

OpenAlex ID: W4411799218

FWCI:

Cites: 7

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Related to: 10