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MEMS Integrated with Self-Assembled Electrets

Year: 2025

Type: conference-paper

Source: IEEE Electron Devices Technology & Manufacturing Conference (EDTM)

DOI: 10.1109/edtm61175.2025.11041074

Author: Daisuke Yamane

Institution: Ritsumeikan University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Japan Science and Technology Agency

Award: 自己バイアス式集積化SAE-MEMSセンサの開発

OpenAlex ID: W4411799261

FWCI:

Cites: 10

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Related to: 10