Laser-Induced Low Temperature Dopant Segregation Schottky Barrier Mosfet for Monolithic-3D
Year: 2025
Type: conference-paper
Authors: Feixiong Wang, Yadong Zhang, Jinbiao Liu, Yunjiao Bao, Zhiyao Wang, Shuang Liu, Mingzheng Ding, Zhaohao Zhang, Qingzhu Zhang, Huaxiang Yin
Institutions: Chinese Academy of Sciences, Institute of Microelectronics
Language: English
Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4411799309