Work

Piezoelectric Micromachined Ultrasonic Transducers for Advanced Sensing Applications

Year: 2025

Type: conference-paper

Source: IEEE Electron Devices Technology & Manufacturing Conference (EDTM)

DOI: 10.1109/edtm61175.2025.11040271

Authors: Bowen Sheng, Lei Zhao, Jinghan Gan, Yufeng Gao, Jiao Xia, Junhao Wang, Chenyuan Zhang, Yipeng Lu

Institution: Peking University

Language: English

Topic: Ultrasonics and Acoustic Wave Propagation

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4411799366

FWCI: 11.86

Cites: 11

Cited by: 2

Related to: 10