Work

A 3.98 Ghz Aluminum Nitride Overmoded Bulk Acoustic Wave Resonator for Temperature Sensing Applications

Year: 2025

Type: conference-paper

Source: IEEE Electron Devices Technology & Manufacturing Conference (EDTM)

DOI: 10.1109/edtm61175.2025.11040940

Authors: Zhi-Qiang Lee, Kuan-Ting Chen, Chin-Yu Chang, Cheng-Chien Lin, Yung-Hsiang Chen, Yelehanka Ramachandramurthy Pradeep, Rakesh Chand, Yenshih Ho, Ming-Huang Li

Institutions: National Tsing Hua University, Vanguard International Semiconductor (Taiwan)

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4411799394

FWCI: 2.791

Cites: 17

Cited by: 1

Related to: 10