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Unveiling the Role of Oxygen Vacancy Inhomogeneity in Enhancing the Reliability of Ferroelectric HfO 2 ZrO 2 Superlattice Structures

Year: 2025

Type: conference-paper

Source: IEEE Electron Devices Technology & Manufacturing Conference (EDTM)

DOI: 10.1109/edtm61175.2025.11041366

Authors: Boyao Cui, Maokun Wu, Sheng Ye, Xuepei Wang, Yuchun Li, Yishan Wu, Yichen Wen, Jinhao Liu, Zhigang Ji, Hongliang Lu, David Wei Zhang, Runsheng Wang, Ru Huang

Institutions: Shanghai Jiao Tong University, Fudan University, Peking University

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4411799468

FWCI:

Cites: 16

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Related to: 10