Work

A SAW Pressure Sensor Based on AlN Thin Film with a Novel Differential Structure: Balancing Sensitivity Enhancement and Temperature Decoupling

Year: 2025

Type: conference-paper

Source: IEEE Electron Devices Technology & Manufacturing Conference (EDTM)

DOI: 10.1109/edtm61175.2025.11040413

Authors: Aobei Chen, Dapeng Li, Ge Gao, Chun Hu, Dezhi Zheng

Institutions: Beihang University, Beijing Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Key Research and Development Program of China

Award: G3293702825

OpenAlex ID: W4411799493

FWCI:

Cites: 7

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Related to: 10