Work

Experimental Investigation of Inserted HfO2 Impact on VFb and Interface via ALD for La2O3 Dipole-First Multi-VT Techniques

Year: 2025

Type: conference-paper

Source: IEEE Electron Devices Technology & Manufacturing Conference (EDTM)

DOI: 10.1109/edtm61175.2025.11041485

Authors: Yanzhao Wei, Jiaxin Yao, Yu Wang, Qingzhu Zhang, Huaxiang Yin

Institutions: Chinese Academy of Sciences, Institute of Microelectronics

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4411799675

FWCI: 2.32

Cites: 8

Cited by: 1

Related to: 10