Work

Numerical Simulation of Inductively Coupled Plasma Based on Machine Learning

Year: 2025

Type: conference-paper

Source: International Conference on Mechatronics Technology and Intelligent Manufacturing (ICMTIM)

DOI: 10.1109/icmtim65484.2025.11040567

Authors: Yuxin Liu, Guangqing Xia

Institution: Dalian University of Technology

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4411800291

FWCI: 2.358

Cites: 7

Cited by: 1

Related to: 10