Work

Enhanced crystallization and dielectric properties of atomic layer deposited SrTiO 3 thin films on Ru electrode by inserting GeO 2 interfacial layer

Year: 2025

Type: article

Source: Materials Horizons

DOI: 10.1039/d5mh00611b

Authors: Heewon Paik, Junil Lim, Haengha Seo, Tae Kyun Kim, Jonghoon Shin, Haewon Song, Dong Gun Kim, Woongkyu Lee, Dae Seon Kwon, Cheol Seong Hwang

Institutions: Seoul National University, Soongsil University, Sookmyung Women's University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Research Foundation of Korea

Award: G7208142174

OpenAlex ID: W4411823384

FWCI: 2.04

Cites: 54

Cited by: 9

Related to: 10