Work

Role of etching processes in MEMS fabrication

Year: 2025

Type: article

Source: i-manager s Journal on Communication Engineering and Systems

DOI: 10.26634/jcs.14.1.21952

Author: Reddy Venkatramana

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4411840564

FWCI:

Cites: 29

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Related to: 10