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A Novel Fullwave-Guided Optical Proximity Correction System Based on Distorted Born Iterative Method

Year: 2025

Type: conference-abstract

DOI: 10.23919/aces66556.2025.11052524

Authors: Zekui Jia, Luis Gomez, Weng Cho Chew, Austin Peng, Ronald Goossens

Institution: Purdue University West Lafayette

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4411950625

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