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Smart Diagnostics for 3D CFET: A Machine Learning Approach to Failure Analysis

Year: 2025

Type: conference-paper

Source: IEEE International Conference on Microelectronic Test Structures (ICMTS)

DOI: 10.1109/icmts63811.2025.11068926

Authors: Jerome Mitard, Husnu Murat Kocak, Thomas Chiarella, Cassie Sheng, Steven Demuyck, Naoto Horiguchi

Institutions: IMEC, KU Leuven

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funder: HORIZON EUROPE Framework Programme

OpenAlex ID: W4412129595

FWCI: 4.641

Cites: 5

Cited by: 2

Related to: 10