Work

Non-uniformities in MOSFET-array characteristics caused by probe-induced mechanical stress

Year: 2025

Type: conference-paper

Source: IEEE International Conference on Microelectronic Test Structures (ICMTS)

DOI: 10.1109/icmts63811.2025.11068898

Authors: Pablo Sarazá-Canflanca, Xue Fan, Simon Van Beek, Erik Bury, Ben Kaczer

Institutions: IMEC, Chengdu Technological University

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412130186

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Cites: 18

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Related to: 10