Work

Analysis of the Characteristics of Al2O3 Silane Formation

Year: 2024

Type: article

Source: Journal of the Institute of Electronics and Information Engineers

DOI: 10.5573/ieie.2024.61.10.57

Authors: Hanbyeol Kim, Younggon Kim

Language: English

Topic: Thermal properties of materials

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4412139656

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