Work

Investigation of mechanical stresses in β-Ga2O3 films obtained by radio frequency magnetron sputtering on porous-Si/Si substrate

Year: 2025

Type: article

Source: The European Physical Journal Applied Physics

DOI: 10.1051/epjap/2025021

Authors: Andriy S. Revenko, Valerii V. Kidalov, Mykhailo P. Derhachov, Roman A. Redko, Robert P. Johnson, Marc A. Assmann, Olexandr I. Gudymenko, Oleksii O. Sushko, Mykhailo M. Koptiev

Language: English

Topic: Ga2O3 and related materials

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: Science Foundation Ireland, Deutsche Forschungsgemeinschaft

OpenAlex ID: W4412347710

FWCI:

Cites: 56

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Related to: 10