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Metastable Nanocrystalline Copper for Effective Copper-to-Copper Bonding

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Year: 2025
Type: article
Source: Nano Letters
DOI: 10.1021/acs.nanolett.5c02448
Authors: Chuan He, Kaiyu Mu, Jingzhuo Zhou, Xinyi Dong, Chunlin Pang, Xingya Wu, Sheng-Jye Cherng, Chih-Chun Chung, Yu-Ting Huang, Yang Lu, Shien-Ping Feng
Institutions: City University of Hong Kong, University of Hong Kong
Language: English

Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed

Funders: City University of Hong Kong, Research Grants Council, University Grants Committee, Innovation and Technology Commission, Basic and Applied Basic Research Foundation of Guangdong Province
Awards: G1068257985, G3967008046, Development of Thermally Instable Nanograined Cu and Thermally Stable Composite Cu For 3DIC Stacking And Advanced Electronic Packaging Applications, G8518669907
OpenAlex ID: W4412364944
FWCI: 1.813
Cites: 35
Cited by: 8
Related to: 10
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